11/29/2012	8:00:06 AM	Helium valve closed
11/29/2012	8:00:06 AM	H2 valve closed
11/29/2012	8:00:06 AM	BCl3 valve closed
11/29/2012	8:00:06 AM	PH3 valve closed
11/29/2012	8:00:06 AM	SiCl4 pre valve closed
11/29/2012	8:00:06 AM	SiCl4 post valve closed
11/29/2012	8:00:06 AM	Main Vac valve closed
11/29/2012	8:00:06 AM	Bypass valve closed
11/29/2012	8:00:06 AM	Bubbler valve closed
11/29/2012	8:00:06 AM	Helium MFC set to  0.000000
11/29/2012	8:00:06 AM	H2 MFC set to  0.000000
11/29/2012	8:00:06 AM	BCl3 MFC set to  0.000000
11/29/2012	8:00:06 AM	PH3 MFC set to  0.000000
11/29/2012	8:00:06 AM	SiCl4 MFC set to  0.000000
11/29/2012	8:00:06 AM	Bypass solenoid MFC set to  0.000000
11/29/2012	8:00:06 AM	Tube furnace set to 0
11/29/2012	8:00:09 AM	Helium valve closed
11/29/2012	8:00:09 AM	BCl3 valve closed
11/29/2012	8:00:09 AM	PH3 valve closed
11/29/2012	8:00:09 AM	SiCl4 pre valve closed
11/29/2012	8:00:09 AM	SiCl4 post valve closed
11/29/2012	8:00:09 AM	Main Vac valve closed
11/29/2012	8:00:09 AM	Bypass valve closed
11/29/2012	8:00:09 AM	Bubbler valve closed
11/29/2012	8:00:09 AM	H2 valve opened
11/29/2012	8:00:09 AM	Helium MFC set to  0.000000
11/29/2012	8:00:09 AM	H2 MFC set to  500.000000
11/29/2012	8:00:09 AM	BCl3 MFC set to  0.000000
11/29/2012	8:00:09 AM	PH3 MFC set to  0.000000
11/29/2012	8:00:09 AM	SiCl4 MFC set to  0.000000
11/29/2012	8:00:09 AM	Bypass solenoid MFC set to  0.000000
11/29/2012	8:00:10 AM	Tube furnace set to 0
11/29/2012	8:01:25 AM	Helium valve closed
11/29/2012	8:01:25 AM	BCl3 valve closed
11/29/2012	8:01:25 AM	PH3 valve closed
11/29/2012	8:01:25 AM	SiCl4 pre valve closed
11/29/2012	8:01:25 AM	SiCl4 post valve closed
11/29/2012	8:01:25 AM	Main Vac valve closed
11/29/2012	8:01:25 AM	Bypass valve closed
11/29/2012	8:01:25 AM	H2 valve opened
11/29/2012	8:01:25 AM	Bubbler valve opened
11/29/2012	8:01:25 AM	Helium MFC set to  0.000000
11/29/2012	8:01:25 AM	H2 MFC set to  500.000000
11/29/2012	8:01:25 AM	BCl3 MFC set to  0.000000
11/29/2012	8:01:25 AM	PH3 MFC set to  0.000000
11/29/2012	8:01:25 AM	SiCl4 MFC set to  0.000000
11/29/2012	8:01:25 AM	Bypass solenoid MFC set to  0.000000
11/29/2012	8:01:25 AM	Tube furnace set to 0
11/29/2012	8:01:26 AM	Helium valve closed
11/29/2012	8:01:26 AM	BCl3 valve closed
11/29/2012	8:01:26 AM	PH3 valve closed
11/29/2012	8:01:26 AM	SiCl4 pre valve closed
11/29/2012	8:01:26 AM	SiCl4 post valve closed
11/29/2012	8:01:26 AM	Main Vac valve closed
11/29/2012	8:01:26 AM	Bypass valve closed
11/29/2012	8:01:26 AM	H2 valve opened
11/29/2012	8:01:26 AM	Bubbler valve opened
11/29/2012	8:01:26 AM	Helium MFC set to  0.000000
11/29/2012	8:01:26 AM	H2 MFC set to  500.000000
11/29/2012	8:01:26 AM	BCl3 MFC set to  0.000000
11/29/2012	8:01:26 AM	PH3 MFC set to  0.000000
11/29/2012	8:01:26 AM	SiCl4 MFC set to  0.000000
11/29/2012	8:01:26 AM	Bypass solenoid MFC set to  0.000000
11/29/2012	8:01:27 AM	Tube furnace set to 1000
11/29/2012	8:21:27 AM	Helium valve closed
11/29/2012	8:21:27 AM	PH3 valve closed
11/29/2012	8:21:27 AM	Main Vac valve closed
11/29/2012	8:21:27 AM	Bypass valve closed
11/29/2012	8:21:27 AM	H2 valve opened
11/29/2012	8:21:27 AM	BCl3 valve opened
11/29/2012	8:21:27 AM	SiCl4 pre valve opened
11/29/2012	8:21:27 AM	SiCl4 post valve opened
11/29/2012	8:21:27 AM	Bubbler valve opened
11/29/2012	8:21:27 AM	Helium MFC set to  0.000000
11/29/2012	8:21:27 AM	H2 MFC set to  450.000000
11/29/2012	8:21:27 AM	BCl3 MFC set to  1.500000
11/29/2012	8:21:27 AM	PH3 MFC set to  0.000000
11/29/2012	8:21:27 AM	SiCl4 MFC set to  50.000000
11/29/2012	8:21:27 AM	Bypass solenoid MFC set to  0.000000
11/29/2012	8:21:27 AM	Tube furnace set to 1000
11/29/2012	8:36:27 AM	Helium valve closed
11/29/2012	8:36:27 AM	BCl3 valve closed
11/29/2012	8:36:27 AM	Main Vac valve closed
11/29/2012	8:36:27 AM	Bypass valve closed
11/29/2012	8:36:27 AM	H2 valve opened
11/29/2012	8:36:27 AM	PH3 valve opened
11/29/2012	8:36:27 AM	SiCl4 pre valve opened
11/29/2012	8:36:27 AM	SiCl4 post valve opened
11/29/2012	8:36:27 AM	Bubbler valve opened
11/29/2012	8:36:27 AM	Helium MFC set to  0.000000
11/29/2012	8:36:27 AM	H2 MFC set to  450.000000
11/29/2012	8:36:27 AM	BCl3 MFC set to  0.000000
11/29/2012	8:36:27 AM	PH3 MFC set to  20.000000
11/29/2012	8:36:27 AM	SiCl4 MFC set to  50.000000
11/29/2012	8:36:27 AM	Bypass solenoid MFC set to  0.000000
11/29/2012	8:36:27 AM	Tube furnace set to 1000
11/29/2012	8:41:27 AM	Helium valve closed
11/29/2012	8:41:27 AM	BCl3 valve closed
11/29/2012	8:41:27 AM	PH3 valve closed
11/29/2012	8:41:27 AM	SiCl4 pre valve closed
11/29/2012	8:41:27 AM	SiCl4 post valve closed
11/29/2012	8:41:27 AM	Main Vac valve closed
11/29/2012	8:41:27 AM	Bypass valve closed
11/29/2012	8:41:27 AM	H2 valve opened
11/29/2012	8:41:27 AM	Bubbler valve opened
11/29/2012	8:41:27 AM	Helium MFC set to  0.000000
11/29/2012	8:41:27 AM	H2 MFC set to  500.000000
11/29/2012	8:41:27 AM	BCl3 MFC set to  0.000000
11/29/2012	8:41:27 AM	PH3 MFC set to  0.000000
11/29/2012	8:41:27 AM	SiCl4 MFC set to  0.000000
11/29/2012	8:41:27 AM	Bypass solenoid MFC set to  0.000000
11/29/2012	8:41:28 AM	Tube furnace set to 950
11/29/2012	8:44:28 AM	Helium valve closed
11/29/2012	8:44:28 AM	BCl3 valve closed
11/29/2012	8:44:28 AM	PH3 valve closed
11/29/2012	8:44:28 AM	SiCl4 pre valve closed
11/29/2012	8:44:28 AM	SiCl4 post valve closed
11/29/2012	8:44:28 AM	Main Vac valve closed
11/29/2012	8:44:28 AM	Bypass valve closed
11/29/2012	8:44:28 AM	H2 valve opened
11/29/2012	8:44:28 AM	Bubbler valve opened
11/29/2012	8:44:28 AM	Helium MFC set to  0.000000
11/29/2012	8:44:28 AM	H2 MFC set to  500.000000
11/29/2012	8:44:28 AM	BCl3 MFC set to  0.000000
11/29/2012	8:44:28 AM	PH3 MFC set to  0.000000
11/29/2012	8:44:28 AM	SiCl4 MFC set to  0.000000
11/29/2012	8:44:28 AM	Bypass solenoid MFC set to  0.000000
11/29/2012	8:44:28 AM	Tube furnace set to 900
11/29/2012	8:47:28 AM	Helium valve closed
11/29/2012	8:47:28 AM	BCl3 valve closed
11/29/2012	8:47:28 AM	PH3 valve closed
11/29/2012	8:47:28 AM	SiCl4 pre valve closed
11/29/2012	8:47:28 AM	SiCl4 post valve closed
11/29/2012	8:47:28 AM	Main Vac valve closed
11/29/2012	8:47:28 AM	Bypass valve closed
11/29/2012	8:47:28 AM	H2 valve opened
11/29/2012	8:47:28 AM	Bubbler valve opened
11/29/2012	8:47:28 AM	Helium MFC set to  0.000000
11/29/2012	8:47:28 AM	H2 MFC set to  500.000000
11/29/2012	8:47:28 AM	BCl3 MFC set to  0.000000
11/29/2012	8:47:28 AM	PH3 MFC set to  0.000000
11/29/2012	8:47:28 AM	SiCl4 MFC set to  0.000000
11/29/2012	8:47:28 AM	Bypass solenoid MFC set to  0.000000
11/29/2012	8:47:28 AM	Tube furnace set to 850
11/29/2012	8:50:28 AM	Helium valve closed
11/29/2012	8:50:28 AM	BCl3 valve closed
11/29/2012	8:50:28 AM	PH3 valve closed
11/29/2012	8:50:28 AM	SiCl4 pre valve closed
11/29/2012	8:50:28 AM	SiCl4 post valve closed
11/29/2012	8:50:28 AM	Main Vac valve closed
11/29/2012	8:50:28 AM	Bypass valve closed
11/29/2012	8:50:28 AM	H2 valve opened
11/29/2012	8:50:28 AM	Bubbler valve opened
11/29/2012	8:50:28 AM	Helium MFC set to  0.000000
11/29/2012	8:50:28 AM	H2 MFC set to  500.000000
11/29/2012	8:50:28 AM	BCl3 MFC set to  0.000000
11/29/2012	8:50:28 AM	PH3 MFC set to  0.000000
11/29/2012	8:50:28 AM	SiCl4 MFC set to  0.000000
11/29/2012	8:50:28 AM	Bypass solenoid MFC set to  0.000000
11/29/2012	8:50:28 AM	Tube furnace set to 800
11/29/2012	8:53:28 AM	Helium valve closed
11/29/2012	8:53:28 AM	BCl3 valve closed
11/29/2012	8:53:28 AM	PH3 valve closed
11/29/2012	8:53:28 AM	SiCl4 pre valve closed
11/29/2012	8:53:28 AM	SiCl4 post valve closed
11/29/2012	8:53:28 AM	Main Vac valve closed
11/29/2012	8:53:28 AM	Bypass valve closed
11/29/2012	8:53:28 AM	H2 valve opened
11/29/2012	8:53:28 AM	Bubbler valve opened
11/29/2012	8:53:28 AM	Helium MFC set to  0.000000
11/29/2012	8:53:28 AM	H2 MFC set to  500.000000
11/29/2012	8:53:28 AM	BCl3 MFC set to  0.000000
11/29/2012	8:53:28 AM	PH3 MFC set to  0.000000
11/29/2012	8:53:28 AM	SiCl4 MFC set to  0.000000
11/29/2012	8:53:29 AM	Bypass solenoid MFC set to  0.000000
11/29/2012	8:53:29 AM	Tube furnace set to 750
11/29/2012	8:56:29 AM	H2 valve closed
11/29/2012	8:56:29 AM	BCl3 valve closed
11/29/2012	8:56:29 AM	PH3 valve closed
11/29/2012	8:56:29 AM	SiCl4 pre valve closed
11/29/2012	8:56:29 AM	SiCl4 post valve closed
11/29/2012	8:56:29 AM	Main Vac valve closed
11/29/2012	8:56:29 AM	Bypass valve closed
11/29/2012	8:56:29 AM	Helium valve opened
11/29/2012	8:56:29 AM	Bubbler valve opened
11/29/2012	8:56:29 AM	Helium MFC set to  500.000000
11/29/2012	8:56:29 AM	H2 MFC set to  0.000000
11/29/2012	8:56:29 AM	BCl3 MFC set to  0.000000
11/29/2012	8:56:29 AM	PH3 MFC set to  0.000000
11/29/2012	8:56:29 AM	SiCl4 MFC set to  0.000000
11/29/2012	8:56:29 AM	Bypass solenoid MFC set to  0.000000
11/29/2012	8:56:29 AM	Tube furnace set to 0
11/29/2012	9:16:29 AM	Helium valve closed
11/29/2012	9:16:29 AM	H2 valve closed
11/29/2012	9:16:29 AM	BCl3 valve closed
11/29/2012	9:16:29 AM	PH3 valve closed
11/29/2012	9:16:29 AM	SiCl4 pre valve closed
11/29/2012	9:16:29 AM	SiCl4 post valve closed
11/29/2012	9:16:29 AM	Main Vac valve closed
11/29/2012	9:16:29 AM	Bypass valve closed
11/29/2012	9:16:29 AM	Bubbler valve closed
11/29/2012	9:16:29 AM	Helium MFC set to  0.000000
11/29/2012	9:16:29 AM	H2 MFC set to  0.000000
11/29/2012	9:16:29 AM	BCl3 MFC set to  0.000000
11/29/2012	9:16:29 AM	PH3 MFC set to  0.000000
11/29/2012	9:16:29 AM	SiCl4 MFC set to  0.000000
11/29/2012	9:16:29 AM	Bypass solenoid MFC set to  0.000000
11/29/2012	9:16:29 AM	Tube furnace set to 0
11/29/2012	9:36:59 AM	Run aborted at 9:36 AM
11/29/2012	9:36:59 AM	Helium valve closed
11/29/2012	9:36:59 AM	H2 valve closed
11/29/2012	9:36:59 AM	BCl3 valve closed
11/29/2012	9:36:59 AM	PH3 valve closed
11/29/2012	9:36:59 AM	SiCl4 pre valve closed
11/29/2012	9:36:59 AM	SiCl4 post valve closed
11/29/2012	9:36:59 AM	Bypass valve closed
11/29/2012	9:36:59 AM	Main Vac valve closed
11/29/2012	9:36:59 AM	Bubbler valve closed
11/29/2012	9:36:59 AM	Helium MFC set to  0.000000
11/29/2012	9:36:59 AM	H2 MFC set to  0.000000
11/29/2012	9:36:59 AM	BCl3 MFC set to  0.000000
11/29/2012	9:36:59 AM	PH3 MFC set to  0.000000
11/29/2012	9:36:59 AM	SiCl4 MFC set to  0.000000
11/29/2012	9:36:59 AM	Tube furnace set to 0
11/29/2012	9:37:03 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/29/2012	9:37:04 AM	Recipe started at 9:37 AM
11/29/2012	9:37:04 AM	Helium valve closed
11/29/2012	9:37:04 AM	H2 valve closed
11/29/2012	9:37:04 AM	BCl3 valve closed
11/29/2012	9:37:04 AM	PH3 valve closed
11/29/2012	9:37:04 AM	SiCl4 pre valve closed
11/29/2012	9:37:04 AM	SiCl4 post valve closed
11/29/2012	9:37:04 AM	Main Vac valve closed
11/29/2012	9:37:04 AM	Bypass valve closed
11/29/2012	9:37:04 AM	Bubbler valve closed
11/29/2012	9:37:04 AM	Helium MFC set to  0.000000
11/29/2012	9:37:04 AM	H2 MFC set to  0.000000
11/29/2012	9:37:04 AM	BCl3 MFC set to  0.000000
11/29/2012	9:37:04 AM	PH3 MFC set to  0.000000
11/29/2012	9:37:04 AM	SiCl4 MFC set to  0.000000
11/29/2012	9:37:04 AM	Bypass solenoid MFC set to  0.000000
11/29/2012	9:37:04 AM	Tube furnace set to 0
11/29/2012	9:37:07 AM	H2 valve closed
11/29/2012	9:37:07 AM	BCl3 valve closed
11/29/2012	9:37:07 AM	PH3 valve closed
11/29/2012	9:37:07 AM	SiCl4 pre valve closed
11/29/2012	9:37:07 AM	SiCl4 post valve closed
11/29/2012	9:37:07 AM	Main Vac valve closed
11/29/2012	9:37:07 AM	Bypass valve closed
11/29/2012	9:37:07 AM	Bubbler valve closed
11/29/2012	9:37:07 AM	Helium valve opened
11/29/2012	9:37:07 AM	Helium MFC set to  500.000000
11/29/2012	9:37:07 AM	H2 MFC set to  0.000000
11/29/2012	9:37:07 AM	BCl3 MFC set to  0.000000
11/29/2012	9:37:07 AM	PH3 MFC set to  0.000000
11/29/2012	9:37:07 AM	SiCl4 MFC set to  0.000000
11/29/2012	9:37:07 AM	Bypass solenoid MFC set to  0.000000
11/29/2012	9:37:07 AM	Tube furnace set to 0
11/29/2012	9:37:08 AM	Helium valve closed
11/29/2012	9:37:08 AM	H2 valve closed
11/29/2012	9:37:08 AM	BCl3 valve closed
11/29/2012	9:37:08 AM	PH3 valve closed
11/29/2012	9:37:08 AM	SiCl4 pre valve closed
11/29/2012	9:37:08 AM	SiCl4 post valve closed
11/29/2012	9:37:08 AM	Main Vac valve closed
11/29/2012	9:37:08 AM	Bypass valve closed
11/29/2012	9:37:08 AM	Bubbler valve closed
11/29/2012	9:37:08 AM	Helium MFC set to  0.000000
11/29/2012	9:37:08 AM	H2 MFC set to  0.000000
11/29/2012	9:37:08 AM	BCl3 MFC set to  0.000000
11/29/2012	9:37:08 AM	PH3 MFC set to  0.000000
11/29/2012	9:37:08 AM	SiCl4 MFC set to  0.000000
11/29/2012	9:37:08 AM	Bypass solenoid MFC set to  0.000000
11/29/2012	9:37:08 AM	Tube furnace set to 0
11/29/2012	9:37:09 AM	Run finished at 9:37 AM
11/29/2012	9:37:09 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/29/2012	9:41:20 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/29/2012	9:41:21 AM	Recipe started at 9:41 AM
11/29/2012	9:41:21 AM	Helium valve closed
11/29/2012	9:41:21 AM	H2 valve closed
11/29/2012	9:41:21 AM	BCl3 valve closed
11/29/2012	9:41:21 AM	PH3 valve closed
11/29/2012	9:41:21 AM	SiCl4 pre valve closed
11/29/2012	9:41:21 AM	SiCl4 post valve closed
11/29/2012	9:41:21 AM	Main Vac valve closed
11/29/2012	9:41:21 AM	Bubbler valve closed
11/29/2012	9:41:21 AM	Bypass valve opened
11/29/2012	9:41:21 AM	Helium MFC set to  0.000000
11/29/2012	9:41:21 AM	H2 MFC set to  0.000000
11/29/2012	9:41:21 AM	BCl3 MFC set to  0.000000
11/29/2012	9:41:21 AM	PH3 MFC set to  0.000000
11/29/2012	9:41:21 AM	SiCl4 MFC set to  0.000000
11/29/2012	9:41:21 AM	Bypass solenoid MFC set to  0.000000
11/29/2012	9:41:21 AM	Tube furnace set to 0
11/29/2012	9:42:33 AM	Helium valve closed
11/29/2012	9:42:33 AM	H2 valve closed
11/29/2012	9:42:33 AM	BCl3 valve closed
11/29/2012	9:42:33 AM	PH3 valve closed
11/29/2012	9:42:33 AM	SiCl4 pre valve closed
11/29/2012	9:42:33 AM	SiCl4 post valve closed
11/29/2012	9:42:33 AM	Main Vac valve closed
11/29/2012	9:42:33 AM	Bubbler valve closed
11/29/2012	9:42:33 AM	Bypass valve opened
11/29/2012	9:42:33 AM	Helium MFC set to  0.000000
11/29/2012	9:42:33 AM	H2 MFC set to  0.000000
11/29/2012	9:42:33 AM	BCl3 MFC set to  0.000000
11/29/2012	9:42:33 AM	PH3 MFC set to  0.000000
11/29/2012	9:42:33 AM	SiCl4 MFC set to  0.000000
11/29/2012	9:42:33 AM	Bypass solenoid MFC set to  0.000000
11/29/2012	9:42:33 AM	Tube furnace set to 0
11/29/2012	9:43:33 AM	Helium valve closed
11/29/2012	9:43:33 AM	H2 valve closed
11/29/2012	9:43:33 AM	BCl3 valve closed
11/29/2012	9:43:33 AM	PH3 valve closed
11/29/2012	9:43:33 AM	SiCl4 pre valve closed
11/29/2012	9:43:33 AM	SiCl4 post valve closed
11/29/2012	9:43:33 AM	Bypass valve closed
11/29/2012	9:43:33 AM	Bubbler valve closed
11/29/2012	9:43:33 AM	Main Vac valve opened
11/29/2012	9:43:33 AM	Helium MFC set to  0.000000
11/29/2012	9:43:33 AM	H2 MFC set to  0.000000
11/29/2012	9:43:33 AM	BCl3 MFC set to  0.000000
11/29/2012	9:43:33 AM	PH3 MFC set to  0.000000
11/29/2012	9:43:33 AM	SiCl4 MFC set to  0.000000
11/29/2012	9:43:33 AM	Bypass solenoid MFC set to  0.000000
11/29/2012	9:43:33 AM	Tube furnace set to 0
11/29/2012	9:43:34 AM	Run finished at 9:43 AM
11/29/2012	9:43:34 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/29/2012	11:49:17 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/29/2012	11:49:18 AM	Recipe started at 11:49 AM
11/29/2012	11:49:18 AM	Helium valve closed
11/29/2012	11:49:18 AM	H2 valve closed
11/29/2012	11:49:18 AM	BCl3 valve closed
11/29/2012	11:49:18 AM	PH3 valve closed
11/29/2012	11:49:18 AM	SiCl4 pre valve closed
11/29/2012	11:49:18 AM	SiCl4 post valve closed
11/29/2012	11:49:18 AM	Main Vac valve closed
11/29/2012	11:49:18 AM	Bypass valve closed
11/29/2012	11:49:18 AM	Bubbler valve closed
11/29/2012	11:49:18 AM	Helium MFC set to  0.000000
11/29/2012	11:49:18 AM	H2 MFC set to  0.000000
11/29/2012	11:49:18 AM	BCl3 MFC set to  0.000000
11/29/2012	11:49:18 AM	PH3 MFC set to  0.000000
11/29/2012	11:49:18 AM	SiCl4 MFC set to  0.000000
11/29/2012	11:49:18 AM	Bypass solenoid MFC set to  0.000000
11/29/2012	11:49:18 AM	Tube furnace set to 0
11/29/2012	11:49:21 AM	H2 valve closed
11/29/2012	11:49:21 AM	BCl3 valve closed
11/29/2012	11:49:21 AM	PH3 valve closed
11/29/2012	11:49:21 AM	SiCl4 pre valve closed
11/29/2012	11:49:21 AM	SiCl4 post valve closed
11/29/2012	11:49:21 AM	Main Vac valve closed
11/29/2012	11:49:21 AM	Bypass valve closed
11/29/2012	11:49:21 AM	Bubbler valve closed
11/29/2012	11:49:21 AM	Helium valve opened
11/29/2012	11:49:21 AM	Helium MFC set to  500.000000
11/29/2012	11:49:21 AM	H2 MFC set to  0.000000
11/29/2012	11:49:21 AM	BCl3 MFC set to  0.000000
11/29/2012	11:49:21 AM	PH3 MFC set to  0.000000
11/29/2012	11:49:21 AM	SiCl4 MFC set to  0.000000
11/29/2012	11:49:21 AM	Bypass solenoid MFC set to  0.000000
11/29/2012	11:49:21 AM	Tube furnace set to 0
11/29/2012	11:50:33 AM	Helium valve closed
11/29/2012	11:50:33 AM	H2 valve closed
11/29/2012	11:50:33 AM	BCl3 valve closed
11/29/2012	11:50:33 AM	PH3 valve closed
11/29/2012	11:50:33 AM	SiCl4 pre valve closed
11/29/2012	11:50:33 AM	SiCl4 post valve closed
11/29/2012	11:50:33 AM	Main Vac valve closed
11/29/2012	11:50:33 AM	Bypass valve closed
11/29/2012	11:50:33 AM	Bubbler valve closed
11/29/2012	11:50:33 AM	Helium MFC set to  0.000000
11/29/2012	11:50:33 AM	H2 MFC set to  0.000000
11/29/2012	11:50:33 AM	BCl3 MFC set to  0.000000
11/29/2012	11:50:33 AM	PH3 MFC set to  0.000000
11/29/2012	11:50:33 AM	SiCl4 MFC set to  0.000000
11/29/2012	11:50:33 AM	Bypass solenoid MFC set to  0.000000
11/29/2012	11:50:33 AM	Tube furnace set to 0
11/29/2012	11:50:34 AM	Run finished at 11:50 AM
11/29/2012	11:50:34 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/29/2012	11:54:58 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/29/2012	11:54:59 AM	Recipe started at 11:54 AM
11/29/2012	11:54:59 AM	Helium valve closed
11/29/2012	11:54:59 AM	H2 valve closed
11/29/2012	11:54:59 AM	BCl3 valve closed
11/29/2012	11:54:59 AM	PH3 valve closed
11/29/2012	11:54:59 AM	SiCl4 pre valve closed
11/29/2012	11:54:59 AM	SiCl4 post valve closed
11/29/2012	11:54:59 AM	Main Vac valve closed
11/29/2012	11:54:59 AM	Bubbler valve closed
11/29/2012	11:54:59 AM	Bypass valve opened
11/29/2012	11:54:59 AM	Helium MFC set to  0.000000
11/29/2012	11:54:59 AM	H2 MFC set to  0.000000
11/29/2012	11:54:59 AM	BCl3 MFC set to  0.000000
11/29/2012	11:54:59 AM	PH3 MFC set to  0.000000
11/29/2012	11:54:59 AM	SiCl4 MFC set to  0.000000
11/29/2012	11:54:59 AM	Bypass solenoid MFC set to  0.000000
11/29/2012	11:55:00 AM	Tube furnace set to 0
11/29/2012	11:56:19 AM	Helium valve closed
11/29/2012	11:56:19 AM	H2 valve closed
11/29/2012	11:56:19 AM	BCl3 valve closed
11/29/2012	11:56:19 AM	PH3 valve closed
11/29/2012	11:56:19 AM	SiCl4 pre valve closed
11/29/2012	11:56:19 AM	SiCl4 post valve closed
11/29/2012	11:56:19 AM	Main Vac valve closed
11/29/2012	11:56:19 AM	Bubbler valve closed
11/29/2012	11:56:19 AM	Bypass valve opened
11/29/2012	11:56:19 AM	Helium MFC set to  0.000000
11/29/2012	11:56:19 AM	H2 MFC set to  0.000000
11/29/2012	11:56:19 AM	BCl3 MFC set to  0.000000
11/29/2012	11:56:19 AM	PH3 MFC set to  0.000000
11/29/2012	11:56:19 AM	SiCl4 MFC set to  0.000000
11/29/2012	11:56:19 AM	Bypass solenoid MFC set to  0.000000
11/29/2012	11:56:20 AM	Tube furnace set to 0
11/29/2012	11:57:20 AM	Helium valve closed
11/29/2012	11:57:20 AM	H2 valve closed
11/29/2012	11:57:20 AM	BCl3 valve closed
11/29/2012	11:57:20 AM	PH3 valve closed
11/29/2012	11:57:20 AM	SiCl4 pre valve closed
11/29/2012	11:57:20 AM	SiCl4 post valve closed
11/29/2012	11:57:20 AM	Bypass valve closed
11/29/2012	11:57:20 AM	Bubbler valve closed
11/29/2012	11:57:20 AM	Main Vac valve opened
11/29/2012	11:57:20 AM	Helium MFC set to  0.000000
11/29/2012	11:57:20 AM	H2 MFC set to  0.000000
11/29/2012	11:57:20 AM	BCl3 MFC set to  0.000000
11/29/2012	11:57:20 AM	PH3 MFC set to  0.000000
11/29/2012	11:57:20 AM	SiCl4 MFC set to  0.000000
11/29/2012	11:57:20 AM	Bypass solenoid MFC set to  0.000000
11/29/2012	11:57:20 AM	Tube furnace set to 0
11/29/2012	11:57:21 AM	Run finished at 11:57 AM
11/29/2012	11:57:21 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/29/2012	12:20:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
11/29/2012	12:20:37 PM	Recipe started at 12:20 PM
11/29/2012	12:20:37 PM	Helium valve closed
11/29/2012	12:20:37 PM	H2 valve closed
11/29/2012	12:20:37 PM	BCl3 valve closed
11/29/2012	12:20:37 PM	PH3 valve closed
11/29/2012	12:20:37 PM	SiCl4 pre valve closed
11/29/2012	12:20:37 PM	SiCl4 post valve closed
11/29/2012	12:20:37 PM	Main Vac valve closed
11/29/2012	12:20:37 PM	Bubbler valve closed
11/29/2012	12:20:37 PM	Bypass valve opened
11/29/2012	12:20:37 PM	Helium MFC set to  0.000000
11/29/2012	12:20:37 PM	H2 MFC set to  0.000000
11/29/2012	12:20:37 PM	BCl3 MFC set to  0.000000
11/29/2012	12:20:37 PM	PH3 MFC set to  0.000000
11/29/2012	12:20:37 PM	SiCl4 MFC set to  0.000000
11/29/2012	12:20:37 PM	Bypass solenoid MFC set to  0.000000
11/29/2012	12:20:37 PM	Tube furnace set to 0
11/29/2012	12:20:38 PM	Helium valve closed
11/29/2012	12:20:38 PM	H2 valve closed
11/29/2012	12:20:38 PM	BCl3 valve closed
11/29/2012	12:20:38 PM	PH3 valve closed
11/29/2012	12:20:38 PM	SiCl4 pre valve closed
11/29/2012	12:20:38 PM	SiCl4 post valve closed
11/29/2012	12:20:38 PM	Main Vac valve closed
11/29/2012	12:20:38 PM	Bubbler valve closed
11/29/2012	12:20:38 PM	Bypass valve opened
11/29/2012	12:20:38 PM	Helium MFC set to  0.000000
11/29/2012	12:20:38 PM	H2 MFC set to  0.000000
11/29/2012	12:20:38 PM	BCl3 MFC set to  0.000000
11/29/2012	12:20:38 PM	PH3 MFC set to  0.000000
11/29/2012	12:20:38 PM	SiCl4 MFC set to  0.000000
11/29/2012	12:20:38 PM	Bypass solenoid MFC set to  0.000000
11/29/2012	12:20:38 PM	Tube furnace set to 0
11/29/2012	12:21:08 PM	Helium valve closed
11/29/2012	12:21:08 PM	H2 valve closed
11/29/2012	12:21:08 PM	BCl3 valve closed
11/29/2012	12:21:08 PM	PH3 valve closed
11/29/2012	12:21:08 PM	SiCl4 pre valve closed
11/29/2012	12:21:08 PM	SiCl4 post valve closed
11/29/2012	12:21:08 PM	Bypass valve closed
11/29/2012	12:21:08 PM	Bubbler valve closed
11/29/2012	12:21:08 PM	Main Vac valve opened
11/29/2012	12:21:08 PM	Helium MFC set to  0.000000
11/29/2012	12:21:08 PM	H2 MFC set to  0.000000
11/29/2012	12:21:08 PM	BCl3 MFC set to  0.000000
11/29/2012	12:21:08 PM	PH3 MFC set to  0.000000
11/29/2012	12:21:08 PM	SiCl4 MFC set to  0.000000
11/29/2012	12:21:08 PM	Bypass solenoid MFC set to  0.000000
11/29/2012	12:21:08 PM	Tube furnace set to 0
11/29/2012	12:21:38 PM	H2 valve closed
11/29/2012	12:21:38 PM	BCl3 valve closed
11/29/2012	12:21:38 PM	PH3 valve closed
11/29/2012	12:21:38 PM	SiCl4 pre valve closed
11/29/2012	12:21:38 PM	SiCl4 post valve closed
11/29/2012	12:21:38 PM	Bypass valve closed
11/29/2012	12:21:38 PM	Bubbler valve closed
11/29/2012	12:21:38 PM	Helium valve opened
11/29/2012	12:21:38 PM	Main Vac valve opened
11/29/2012	12:21:38 PM	Helium MFC set to  20.000000
11/29/2012	12:21:38 PM	H2 MFC set to  0.000000
11/29/2012	12:21:38 PM	BCl3 MFC set to  0.000000
11/29/2012	12:21:38 PM	PH3 MFC set to  0.000000
11/29/2012	12:21:38 PM	SiCl4 MFC set to  0.000000
11/29/2012	12:21:38 PM	Bypass solenoid MFC set to  0.000000
11/29/2012	12:21:39 PM	Tube furnace set to 0
11/29/2012	12:22:09 PM	Helium valve closed
11/29/2012	12:22:09 PM	H2 valve closed
11/29/2012	12:22:09 PM	BCl3 valve closed
11/29/2012	12:22:09 PM	PH3 valve closed
11/29/2012	12:22:09 PM	SiCl4 pre valve closed
11/29/2012	12:22:09 PM	SiCl4 post valve closed
11/29/2012	12:22:09 PM	Bypass valve closed
11/29/2012	12:22:09 PM	Bubbler valve closed
11/29/2012	12:22:09 PM	Main Vac valve opened
11/29/2012	12:22:09 PM	Helium MFC set to  0.000000
11/29/2012	12:22:09 PM	H2 MFC set to  0.000000
11/29/2012	12:22:09 PM	BCl3 MFC set to  0.000000
11/29/2012	12:22:09 PM	PH3 MFC set to  0.000000
11/29/2012	12:22:09 PM	SiCl4 MFC set to  0.000000
11/29/2012	12:22:09 PM	Bypass solenoid MFC set to  0.000000
11/29/2012	12:22:09 PM	Tube furnace set to 0
11/29/2012	12:22:39 PM	H2 valve closed
11/29/2012	12:22:39 PM	BCl3 valve closed
11/29/2012	12:22:39 PM	PH3 valve closed
11/29/2012	12:22:39 PM	SiCl4 pre valve closed
11/29/2012	12:22:39 PM	SiCl4 post valve closed
11/29/2012	12:22:39 PM	Bypass valve closed
11/29/2012	12:22:39 PM	Bubbler valve closed
11/29/2012	12:22:39 PM	Helium valve opened
11/29/2012	12:22:39 PM	Main Vac valve opened
11/29/2012	12:22:39 PM	Helium MFC set to  20.000000
11/29/2012	12:22:39 PM	H2 MFC set to  0.000000
11/29/2012	12:22:39 PM	BCl3 MFC set to  0.000000
11/29/2012	12:22:39 PM	PH3 MFC set to  0.000000
11/29/2012	12:22:39 PM	SiCl4 MFC set to  0.000000
11/29/2012	12:22:39 PM	Bypass solenoid MFC set to  0.000000
11/29/2012	12:22:39 PM	Tube furnace set to 0
11/29/2012	12:23:09 PM	Helium valve closed
11/29/2012	12:23:09 PM	H2 valve closed
11/29/2012	12:23:09 PM	BCl3 valve closed
11/29/2012	12:23:09 PM	PH3 valve closed
11/29/2012	12:23:09 PM	SiCl4 pre valve closed
11/29/2012	12:23:09 PM	SiCl4 post valve closed
11/29/2012	12:23:09 PM	Bypass valve closed
11/29/2012	12:23:09 PM	Bubbler valve closed
11/29/2012	12:23:09 PM	Main Vac valve opened
11/29/2012	12:23:09 PM	Helium MFC set to  0.000000
11/29/2012	12:23:09 PM	H2 MFC set to  0.000000
11/29/2012	12:23:09 PM	BCl3 MFC set to  0.000000
11/29/2012	12:23:09 PM	PH3 MFC set to  0.000000
11/29/2012	12:23:09 PM	SiCl4 MFC set to  0.000000
11/29/2012	12:23:09 PM	Bypass solenoid MFC set to  0.000000
11/29/2012	12:23:09 PM	Tube furnace set to 0
11/29/2012	12:23:39 PM	H2 valve closed
11/29/2012	12:23:39 PM	BCl3 valve closed
11/29/2012	12:23:39 PM	PH3 valve closed
11/29/2012	12:23:39 PM	SiCl4 pre valve closed
11/29/2012	12:23:39 PM	SiCl4 post valve closed
11/29/2012	12:23:39 PM	Bypass valve closed
11/29/2012	12:23:39 PM	Bubbler valve closed
11/29/2012	12:23:39 PM	Helium valve opened
11/29/2012	12:23:39 PM	Main Vac valve opened
11/29/2012	12:23:39 PM	Helium MFC set to  20.000000
11/29/2012	12:23:39 PM	H2 MFC set to  0.000000
11/29/2012	12:23:39 PM	BCl3 MFC set to  0.000000
11/29/2012	12:23:39 PM	PH3 MFC set to  0.000000
11/29/2012	12:23:39 PM	SiCl4 MFC set to  0.000000
11/29/2012	12:23:39 PM	Bypass solenoid MFC set to  0.000000
11/29/2012	12:23:40 PM	Tube furnace set to 0
11/29/2012	12:24:10 PM	Helium valve closed
11/29/2012	12:24:10 PM	H2 valve closed
11/29/2012	12:24:10 PM	BCl3 valve closed
11/29/2012	12:24:10 PM	PH3 valve closed
11/29/2012	12:24:10 PM	SiCl4 pre valve closed
11/29/2012	12:24:10 PM	SiCl4 post valve closed
11/29/2012	12:24:10 PM	Bypass valve closed
11/29/2012	12:24:10 PM	Bubbler valve closed
11/29/2012	12:24:10 PM	Main Vac valve opened
11/29/2012	12:24:10 PM	Helium MFC set to  0.000000
11/29/2012	12:24:10 PM	H2 MFC set to  0.000000
11/29/2012	12:24:10 PM	BCl3 MFC set to  0.000000
11/29/2012	12:24:10 PM	PH3 MFC set to  0.000000
11/29/2012	12:24:10 PM	SiCl4 MFC set to  0.000000
11/29/2012	12:24:10 PM	Bypass solenoid MFC set to  0.000000
11/29/2012	12:24:10 PM	Tube furnace set to 0
11/29/2012	12:24:40 PM	H2 valve closed
11/29/2012	12:24:40 PM	BCl3 valve closed
11/29/2012	12:24:40 PM	PH3 valve closed
11/29/2012	12:24:40 PM	SiCl4 pre valve closed
11/29/2012	12:24:40 PM	SiCl4 post valve closed
11/29/2012	12:24:40 PM	Bypass valve closed
11/29/2012	12:24:40 PM	Bubbler valve closed
11/29/2012	12:24:40 PM	Helium valve opened
11/29/2012	12:24:40 PM	Main Vac valve opened
11/29/2012	12:24:40 PM	Helium MFC set to  20.000000
11/29/2012	12:24:40 PM	H2 MFC set to  0.000000
11/29/2012	12:24:40 PM	BCl3 MFC set to  0.000000
11/29/2012	12:24:40 PM	PH3 MFC set to  0.000000
11/29/2012	12:24:40 PM	SiCl4 MFC set to  0.000000
11/29/2012	12:24:40 PM	Bypass solenoid MFC set to  0.000000
11/29/2012	12:24:40 PM	Tube furnace set to 0
11/29/2012	12:25:10 PM	Helium valve closed
11/29/2012	12:25:10 PM	H2 valve closed
11/29/2012	12:25:10 PM	BCl3 valve closed
11/29/2012	12:25:10 PM	PH3 valve closed
11/29/2012	12:25:10 PM	SiCl4 pre valve closed
11/29/2012	12:25:10 PM	SiCl4 post valve closed
11/29/2012	12:25:10 PM	Bypass valve closed
11/29/2012	12:25:10 PM	Bubbler valve closed
11/29/2012	12:25:10 PM	Main Vac valve opened
11/29/2012	12:25:10 PM	Helium MFC set to  0.000000
11/29/2012	12:25:10 PM	H2 MFC set to  0.000000
11/29/2012	12:25:10 PM	BCl3 MFC set to  0.000000
11/29/2012	12:25:10 PM	PH3 MFC set to  0.000000
11/29/2012	12:25:10 PM	SiCl4 MFC set to  0.000000
11/29/2012	12:25:10 PM	Bypass solenoid MFC set to  0.000000
11/29/2012	12:25:10 PM	Tube furnace set to 0
11/29/2012	12:25:40 PM	H2 valve closed
11/29/2012	12:25:40 PM	BCl3 valve closed
11/29/2012	12:25:40 PM	PH3 valve closed
11/29/2012	12:25:40 PM	SiCl4 pre valve closed
11/29/2012	12:25:40 PM	SiCl4 post valve closed
11/29/2012	12:25:40 PM	Bypass valve closed
11/29/2012	12:25:40 PM	Bubbler valve closed
11/29/2012	12:25:40 PM	Helium valve opened
11/29/2012	12:25:40 PM	Main Vac valve opened
11/29/2012	12:25:40 PM	Helium MFC set to  20.000000
11/29/2012	12:25:40 PM	H2 MFC set to  0.000000
11/29/2012	12:25:40 PM	BCl3 MFC set to  0.000000
11/29/2012	12:25:40 PM	PH3 MFC set to  0.000000
11/29/2012	12:25:40 PM	SiCl4 MFC set to  0.000000
11/29/2012	12:25:40 PM	Bypass solenoid MFC set to  0.000000
11/29/2012	12:25:41 PM	Tube furnace set to 0
11/29/2012	12:26:11 PM	Helium valve closed
11/29/2012	12:26:11 PM	H2 valve closed
11/29/2012	12:26:11 PM	BCl3 valve closed
11/29/2012	12:26:11 PM	PH3 valve closed
11/29/2012	12:26:11 PM	SiCl4 pre valve closed
11/29/2012	12:26:11 PM	SiCl4 post valve closed
11/29/2012	12:26:11 PM	Bypass valve closed
11/29/2012	12:26:11 PM	Bubbler valve closed
11/29/2012	12:26:11 PM	Main Vac valve opened
11/29/2012	12:26:11 PM	Helium MFC set to  0.000000
11/29/2012	12:26:11 PM	H2 MFC set to  0.000000
11/29/2012	12:26:11 PM	BCl3 MFC set to  0.000000
11/29/2012	12:26:11 PM	PH3 MFC set to  0.000000
11/29/2012	12:26:11 PM	SiCl4 MFC set to  0.000000
11/29/2012	12:26:11 PM	Bypass solenoid MFC set to  0.000000
11/29/2012	12:26:11 PM	Tube furnace set to 0
11/29/2012	12:26:41 PM	H2 valve closed
11/29/2012	12:26:41 PM	BCl3 valve closed
11/29/2012	12:26:41 PM	PH3 valve closed
11/29/2012	12:26:41 PM	SiCl4 pre valve closed
11/29/2012	12:26:41 PM	SiCl4 post valve closed
11/29/2012	12:26:41 PM	Bypass valve closed
11/29/2012	12:26:41 PM	Bubbler valve closed
11/29/2012	12:26:41 PM	Helium valve opened
11/29/2012	12:26:41 PM	Main Vac valve opened
11/29/2012	12:26:41 PM	Helium MFC set to  20.000000
11/29/2012	12:26:41 PM	H2 MFC set to  0.000000
11/29/2012	12:26:41 PM	BCl3 MFC set to  0.000000
11/29/2012	12:26:41 PM	PH3 MFC set to  0.000000
11/29/2012	12:26:41 PM	SiCl4 MFC set to  0.000000
11/29/2012	12:26:41 PM	Bypass solenoid MFC set to  0.000000
11/29/2012	12:26:41 PM	Tube furnace set to 0
11/29/2012	12:27:11 PM	Helium valve closed
11/29/2012	12:27:11 PM	H2 valve closed
11/29/2012	12:27:11 PM	BCl3 valve closed
11/29/2012	12:27:11 PM	PH3 valve closed
11/29/2012	12:27:11 PM	SiCl4 pre valve closed
11/29/2012	12:27:11 PM	SiCl4 post valve closed
11/29/2012	12:27:11 PM	Bypass valve closed
11/29/2012	12:27:11 PM	Bubbler valve closed
11/29/2012	12:27:11 PM	Main Vac valve opened
11/29/2012	12:27:11 PM	Helium MFC set to  0.000000
11/29/2012	12:27:11 PM	H2 MFC set to  0.000000
11/29/2012	12:27:11 PM	BCl3 MFC set to  0.000000
11/29/2012	12:27:11 PM	PH3 MFC set to  0.000000
11/29/2012	12:27:11 PM	SiCl4 MFC set to  0.000000
11/29/2012	12:27:11 PM	Bypass solenoid MFC set to  0.000000
11/29/2012	12:27:11 PM	Tube furnace set to 0
11/29/2012	12:27:41 PM	H2 valve closed
11/29/2012	12:27:41 PM	BCl3 valve closed
11/29/2012	12:27:41 PM	PH3 valve closed
11/29/2012	12:27:41 PM	SiCl4 pre valve closed
11/29/2012	12:27:41 PM	SiCl4 post valve closed
11/29/2012	12:27:41 PM	Bypass valve closed
11/29/2012	12:27:41 PM	Bubbler valve closed
11/29/2012	12:27:41 PM	Helium valve opened
11/29/2012	12:27:41 PM	Main Vac valve opened
11/29/2012	12:27:41 PM	Helium MFC set to  20.000000
11/29/2012	12:27:41 PM	H2 MFC set to  0.000000
11/29/2012	12:27:41 PM	BCl3 MFC set to  0.000000
11/29/2012	12:27:41 PM	PH3 MFC set to  0.000000
11/29/2012	12:27:41 PM	SiCl4 MFC set to  0.000000
11/29/2012	12:27:41 PM	Bypass solenoid MFC set to  0.000000
11/29/2012	12:27:42 PM	Tube furnace set to 0
11/29/2012	12:28:12 PM	Helium valve closed
11/29/2012	12:28:12 PM	H2 valve closed
11/29/2012	12:28:12 PM	BCl3 valve closed
11/29/2012	12:28:12 PM	PH3 valve closed
11/29/2012	12:28:12 PM	SiCl4 pre valve closed
11/29/2012	12:28:12 PM	SiCl4 post valve closed
11/29/2012	12:28:12 PM	Bypass valve closed
11/29/2012	12:28:12 PM	Bubbler valve closed
11/29/2012	12:28:12 PM	Main Vac valve opened
11/29/2012	12:28:12 PM	Helium MFC set to  0.000000
11/29/2012	12:28:12 PM	H2 MFC set to  0.000000
11/29/2012	12:28:12 PM	BCl3 MFC set to  0.000000
11/29/2012	12:28:12 PM	PH3 MFC set to  0.000000
11/29/2012	12:28:12 PM	SiCl4 MFC set to  0.000000
11/29/2012	12:28:12 PM	Bypass solenoid MFC set to  0.000000
11/29/2012	12:28:12 PM	Tube furnace set to 0
11/29/2012	12:28:42 PM	H2 valve closed
11/29/2012	12:28:42 PM	BCl3 valve closed
11/29/2012	12:28:42 PM	PH3 valve closed
11/29/2012	12:28:42 PM	SiCl4 pre valve closed
11/29/2012	12:28:42 PM	SiCl4 post valve closed
11/29/2012	12:28:42 PM	Bypass valve closed
11/29/2012	12:28:42 PM	Bubbler valve closed
11/29/2012	12:28:42 PM	Helium valve opened
11/29/2012	12:28:42 PM	Main Vac valve opened
11/29/2012	12:28:42 PM	Helium MFC set to  20.000000
11/29/2012	12:28:42 PM	H2 MFC set to  0.000000
11/29/2012	12:28:42 PM	BCl3 MFC set to  0.000000
11/29/2012	12:28:42 PM	PH3 MFC set to  0.000000
11/29/2012	12:28:42 PM	SiCl4 MFC set to  0.000000
11/29/2012	12:28:42 PM	Bypass solenoid MFC set to  0.000000
11/29/2012	12:28:42 PM	Tube furnace set to 0
11/29/2012	12:29:12 PM	Helium valve closed
11/29/2012	12:29:12 PM	H2 valve closed
11/29/2012	12:29:12 PM	BCl3 valve closed
11/29/2012	12:29:12 PM	PH3 valve closed
11/29/2012	12:29:12 PM	SiCl4 pre valve closed
11/29/2012	12:29:12 PM	SiCl4 post valve closed
11/29/2012	12:29:12 PM	Bypass valve closed
11/29/2012	12:29:12 PM	Bubbler valve closed
11/29/2012	12:29:12 PM	Main Vac valve opened
11/29/2012	12:29:12 PM	Helium MFC set to  0.000000
11/29/2012	12:29:12 PM	H2 MFC set to  0.000000
11/29/2012	12:29:12 PM	BCl3 MFC set to  0.000000
11/29/2012	12:29:12 PM	PH3 MFC set to  0.000000
11/29/2012	12:29:12 PM	SiCl4 MFC set to  0.000000
11/29/2012	12:29:12 PM	Bypass solenoid MFC set to  0.000000
11/29/2012	12:29:12 PM	Tube furnace set to 0
11/29/2012	12:29:42 PM	H2 valve closed
11/29/2012	12:29:42 PM	BCl3 valve closed
11/29/2012	12:29:42 PM	PH3 valve closed
11/29/2012	12:29:42 PM	SiCl4 pre valve closed
11/29/2012	12:29:42 PM	SiCl4 post valve closed
11/29/2012	12:29:42 PM	Bypass valve closed
11/29/2012	12:29:42 PM	Bubbler valve closed
11/29/2012	12:29:43 PM	Helium valve opened
11/29/2012	12:29:43 PM	Main Vac valve opened
11/29/2012	12:29:43 PM	Helium MFC set to  20.000000
11/29/2012	12:29:43 PM	H2 MFC set to  0.000000
11/29/2012	12:29:43 PM	BCl3 MFC set to  0.000000
11/29/2012	12:29:43 PM	PH3 MFC set to  0.000000
11/29/2012	12:29:43 PM	SiCl4 MFC set to  0.000000
11/29/2012	12:29:43 PM	Bypass solenoid MFC set to  0.000000
11/29/2012	12:29:43 PM	Tube furnace set to 0
11/29/2012	12:30:13 PM	Helium valve closed
11/29/2012	12:30:13 PM	H2 valve closed
11/29/2012	12:30:13 PM	BCl3 valve closed
11/29/2012	12:30:13 PM	PH3 valve closed
11/29/2012	12:30:13 PM	SiCl4 pre valve closed
11/29/2012	12:30:13 PM	SiCl4 post valve closed
11/29/2012	12:30:13 PM	Bypass valve closed
11/29/2012	12:30:13 PM	Bubbler valve closed
11/29/2012	12:30:13 PM	Main Vac valve opened
11/29/2012	12:30:13 PM	Helium MFC set to  0.000000
11/29/2012	12:30:13 PM	H2 MFC set to  0.000000
11/29/2012	12:30:13 PM	BCl3 MFC set to  0.000000
11/29/2012	12:30:13 PM	PH3 MFC set to  0.000000
11/29/2012	12:30:13 PM	SiCl4 MFC set to  0.000000
11/29/2012	12:30:13 PM	Bypass solenoid MFC set to  0.000000
11/29/2012	12:30:13 PM	Tube furnace set to 0
11/29/2012	12:30:43 PM	H2 valve closed
11/29/2012	12:30:43 PM	BCl3 valve closed
11/29/2012	12:30:43 PM	PH3 valve closed
11/29/2012	12:30:43 PM	SiCl4 pre valve closed
11/29/2012	12:30:43 PM	SiCl4 post valve closed
11/29/2012	12:30:43 PM	Bypass valve closed
11/29/2012	12:30:43 PM	Bubbler valve closed
11/29/2012	12:30:43 PM	Helium valve opened
11/29/2012	12:30:43 PM	Main Vac valve opened
11/29/2012	12:30:43 PM	Helium MFC set to  20.000000
11/29/2012	12:30:43 PM	H2 MFC set to  0.000000
11/29/2012	12:30:43 PM	BCl3 MFC set to  0.000000
11/29/2012	12:30:43 PM	PH3 MFC set to  0.000000
11/29/2012	12:30:43 PM	SiCl4 MFC set to  0.000000
11/29/2012	12:30:43 PM	Bypass solenoid MFC set to  0.000000
11/29/2012	12:30:43 PM	Tube furnace set to 0
11/29/2012	12:31:13 PM	Helium valve closed
11/29/2012	12:31:13 PM	H2 valve closed
11/29/2012	12:31:13 PM	BCl3 valve closed
11/29/2012	12:31:13 PM	PH3 valve closed
11/29/2012	12:31:13 PM	SiCl4 pre valve closed
11/29/2012	12:31:13 PM	SiCl4 post valve closed
11/29/2012	12:31:13 PM	Bypass valve closed
11/29/2012	12:31:13 PM	Bubbler valve closed
11/29/2012	12:31:13 PM	Main Vac valve opened
11/29/2012	12:31:13 PM	Helium MFC set to  0.000000
11/29/2012	12:31:13 PM	H2 MFC set to  0.000000
11/29/2012	12:31:13 PM	BCl3 MFC set to  0.000000
11/29/2012	12:31:13 PM	PH3 MFC set to  0.000000
11/29/2012	12:31:13 PM	SiCl4 MFC set to  0.000000
11/29/2012	12:31:13 PM	Bypass solenoid MFC set to  0.000000
11/29/2012	12:31:13 PM	Tube furnace set to 0
11/29/2012	12:31:14 PM	Run finished at 12:31 PM
11/29/2012	12:31:15 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
11/29/2012	1:29:51 PM	Main Vac valve closed
11/29/2012	1:30:06 PM	Main Vac valve opened
11/29/2012	1:32:36 PM	Recipe started at 1:32 PM
11/29/2012	1:32:36 PM	Helium valve closed
11/29/2012	1:32:36 PM	H2 valve closed
11/29/2012	1:32:36 PM	BCl3 valve closed
11/29/2012	1:32:36 PM	PH3 valve closed
11/29/2012	1:32:36 PM	SiCl4 pre valve closed
11/29/2012	1:32:36 PM	SiCl4 post valve closed
11/29/2012	1:32:36 PM	Main Vac valve closed
11/29/2012	1:32:36 PM	Bypass valve closed
11/29/2012	1:32:36 PM	Bubbler valve closed
11/29/2012	1:32:36 PM	Helium MFC set to  0.000000
11/29/2012	1:32:36 PM	H2 MFC set to  0.000000
11/29/2012	1:32:36 PM	BCl3 MFC set to  0.000000
11/29/2012	1:32:36 PM	PH3 MFC set to  0.000000
11/29/2012	1:32:36 PM	SiCl4 MFC set to  0.000000
11/29/2012	1:32:36 PM	Bypass solenoid MFC set to  0.000000
11/29/2012	1:32:36 PM	Tube furnace set to 0
11/29/2012	1:32:39 PM	Helium valve closed
11/29/2012	1:32:39 PM	BCl3 valve closed
11/29/2012	1:32:39 PM	PH3 valve closed
11/29/2012	1:32:39 PM	SiCl4 pre valve closed
11/29/2012	1:32:39 PM	SiCl4 post valve closed
11/29/2012	1:32:39 PM	Main Vac valve closed
11/29/2012	1:32:39 PM	Bypass valve closed
11/29/2012	1:32:39 PM	Bubbler valve closed
11/29/2012	1:32:39 PM	H2 valve opened
11/29/2012	1:32:39 PM	Helium MFC set to  0.000000
11/29/2012	1:32:39 PM	H2 MFC set to  500.000000
11/29/2012	1:32:39 PM	BCl3 MFC set to  0.000000
11/29/2012	1:32:39 PM	PH3 MFC set to  0.000000
11/29/2012	1:32:39 PM	SiCl4 MFC set to  0.000000
11/29/2012	1:32:39 PM	Bypass solenoid MFC set to  0.000000
11/29/2012	1:32:39 PM	Tube furnace set to 0
11/29/2012	1:33:56 PM	Helium valve closed
11/29/2012	1:33:56 PM	BCl3 valve closed
11/29/2012	1:33:56 PM	PH3 valve closed
11/29/2012	1:33:56 PM	SiCl4 pre valve closed
11/29/2012	1:33:56 PM	SiCl4 post valve closed
11/29/2012	1:33:56 PM	Main Vac valve closed
11/29/2012	1:33:56 PM	Bypass valve closed
11/29/2012	1:33:56 PM	H2 valve opened
11/29/2012	1:33:56 PM	Bubbler valve opened
11/29/2012	1:33:56 PM	Helium MFC set to  0.000000
11/29/2012	1:33:56 PM	H2 MFC set to  500.000000
11/29/2012	1:33:56 PM	BCl3 MFC set to  0.000000
11/29/2012	1:33:56 PM	PH3 MFC set to  0.000000
11/29/2012	1:33:56 PM	SiCl4 MFC set to  0.000000
11/29/2012	1:33:56 PM	Bypass solenoid MFC set to  0.000000
11/29/2012	1:33:56 PM	Tube furnace set to 0
11/29/2012	1:33:57 PM	Helium valve closed
11/29/2012	1:33:57 PM	BCl3 valve closed
11/29/2012	1:33:57 PM	PH3 valve closed
11/29/2012	1:33:57 PM	SiCl4 pre valve closed
11/29/2012	1:33:57 PM	SiCl4 post valve closed
11/29/2012	1:33:57 PM	Main Vac valve closed
11/29/2012	1:33:57 PM	Bypass valve closed
11/29/2012	1:33:57 PM	H2 valve opened
11/29/2012	1:33:57 PM	Bubbler valve opened
11/29/2012	1:33:57 PM	Helium MFC set to  0.000000
11/29/2012	1:33:57 PM	H2 MFC set to  500.000000
11/29/2012	1:33:57 PM	BCl3 MFC set to  0.000000
11/29/2012	1:33:57 PM	PH3 MFC set to  0.000000
11/29/2012	1:33:57 PM	SiCl4 MFC set to  0.000000
11/29/2012	1:33:57 PM	Bypass solenoid MFC set to  0.000000
11/29/2012	1:33:57 PM	Tube furnace set to 1000
11/29/2012	1:53:57 PM	Helium valve closed
11/29/2012	1:53:57 PM	PH3 valve closed
11/29/2012	1:53:57 PM	Main Vac valve closed
11/29/2012	1:53:57 PM	Bypass valve closed
11/29/2012	1:53:58 PM	H2 valve opened
11/29/2012	1:53:58 PM	BCl3 valve opened
11/29/2012	1:53:58 PM	SiCl4 pre valve opened
11/29/2012	1:53:58 PM	SiCl4 post valve opened
11/29/2012	1:53:58 PM	Bubbler valve opened
11/29/2012	1:53:58 PM	Helium MFC set to  0.000000
11/29/2012	1:53:58 PM	H2 MFC set to  450.000000
11/29/2012	1:53:58 PM	BCl3 MFC set to  1.300000
11/29/2012	1:53:58 PM	PH3 MFC set to  0.000000
11/29/2012	1:53:58 PM	SiCl4 MFC set to  50.000000
11/29/2012	1:53:58 PM	Bypass solenoid MFC set to  0.000000
11/29/2012	1:53:58 PM	Tube furnace set to 1000
11/29/2012	2:13:58 PM	Helium valve closed
11/29/2012	2:13:58 PM	BCl3 valve closed
11/29/2012	2:13:58 PM	PH3 valve closed
11/29/2012	2:13:58 PM	SiCl4 pre valve closed
11/29/2012	2:13:58 PM	SiCl4 post valve closed
11/29/2012	2:13:58 PM	Main Vac valve closed
11/29/2012	2:13:58 PM	Bypass valve closed
11/29/2012	2:13:58 PM	H2 valve opened
11/29/2012	2:13:58 PM	Bubbler valve opened
11/29/2012	2:13:58 PM	Helium MFC set to  0.000000
11/29/2012	2:13:58 PM	H2 MFC set to  500.000000
11/29/2012	2:13:58 PM	BCl3 MFC set to  0.000000
11/29/2012	2:13:58 PM	PH3 MFC set to  0.000000
11/29/2012	2:13:58 PM	SiCl4 MFC set to  0.000000
11/29/2012	2:13:58 PM	Bypass solenoid MFC set to  0.000000
11/29/2012	2:13:58 PM	Tube furnace set to 750
11/29/2012	2:18:58 PM	H2 valve closed
11/29/2012	2:18:58 PM	BCl3 valve closed
11/29/2012	2:18:58 PM	PH3 valve closed
11/29/2012	2:18:58 PM	SiCl4 pre valve closed
11/29/2012	2:18:58 PM	SiCl4 post valve closed
11/29/2012	2:18:58 PM	Main Vac valve closed
11/29/2012	2:18:58 PM	Bypass valve closed
11/29/2012	2:18:58 PM	Helium valve opened
11/29/2012	2:18:58 PM	Bubbler valve opened
11/29/2012	2:18:58 PM	Helium MFC set to  500.000000
11/29/2012	2:18:58 PM	H2 MFC set to  0.000000
11/29/2012	2:18:58 PM	BCl3 MFC set to  0.000000
11/29/2012	2:18:58 PM	PH3 MFC set to  0.000000
11/29/2012	2:18:58 PM	SiCl4 MFC set to  0.000000
11/29/2012	2:18:58 PM	Bypass solenoid MFC set to  0.000000
11/29/2012	2:18:58 PM	Tube furnace set to 0
11/29/2012	2:38:58 PM	Helium valve closed
11/29/2012	2:38:58 PM	H2 valve closed
11/29/2012	2:38:58 PM	BCl3 valve closed
11/29/2012	2:38:58 PM	PH3 valve closed
11/29/2012	2:38:58 PM	SiCl4 pre valve closed
11/29/2012	2:38:58 PM	SiCl4 post valve closed
11/29/2012	2:38:58 PM	Main Vac valve closed
11/29/2012	2:38:58 PM	Bypass valve closed
11/29/2012	2:38:58 PM	Bubbler valve closed
11/29/2012	2:38:58 PM	Helium MFC set to  0.000000
11/29/2012	2:38:58 PM	H2 MFC set to  0.000000
11/29/2012	2:38:58 PM	BCl3 MFC set to  0.000000
11/29/2012	2:38:58 PM	PH3 MFC set to  0.000000
11/29/2012	2:38:58 PM	SiCl4 MFC set to  0.000000
11/29/2012	2:38:58 PM	Bypass solenoid MFC set to  0.000000
11/29/2012	2:38:58 PM	Tube furnace set to 0
11/29/2012	2:39:00 PM	Run finished at 2:39 PM
11/29/2012	4:16:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/29/2012	4:16:47 PM	Recipe started at 4:16 PM
11/29/2012	4:16:47 PM	Helium valve closed
11/29/2012	4:16:47 PM	H2 valve closed
11/29/2012	4:16:47 PM	BCl3 valve closed
11/29/2012	4:16:47 PM	PH3 valve closed
11/29/2012	4:16:47 PM	SiCl4 pre valve closed
11/29/2012	4:16:47 PM	SiCl4 post valve closed
11/29/2012	4:16:47 PM	Main Vac valve closed
11/29/2012	4:16:47 PM	Bypass valve closed
11/29/2012	4:16:47 PM	Bubbler valve closed
11/29/2012	4:16:47 PM	Helium MFC set to  0.000000
11/29/2012	4:16:47 PM	H2 MFC set to  0.000000
11/29/2012	4:16:47 PM	BCl3 MFC set to  0.000000
11/29/2012	4:16:47 PM	PH3 MFC set to  0.000000
11/29/2012	4:16:47 PM	SiCl4 MFC set to  0.000000
11/29/2012	4:16:47 PM	Bypass solenoid MFC set to  0.000000
11/29/2012	4:16:47 PM	Tube furnace set to 0
11/29/2012	4:16:50 PM	H2 valve closed
11/29/2012	4:16:50 PM	BCl3 valve closed
11/29/2012	4:16:50 PM	PH3 valve closed
11/29/2012	4:16:50 PM	SiCl4 pre valve closed
11/29/2012	4:16:50 PM	SiCl4 post valve closed
11/29/2012	4:16:50 PM	Main Vac valve closed
11/29/2012	4:16:50 PM	Bypass valve closed
11/29/2012	4:16:50 PM	Bubbler valve closed
11/29/2012	4:16:50 PM	Helium valve opened
11/29/2012	4:16:50 PM	Helium MFC set to  500.000000
11/29/2012	4:16:50 PM	H2 MFC set to  0.000000
11/29/2012	4:16:51 PM	BCl3 MFC set to  0.000000
11/29/2012	4:16:51 PM	PH3 MFC set to  0.000000
11/29/2012	4:16:51 PM	SiCl4 MFC set to  0.000000
11/29/2012	4:16:51 PM	Bypass solenoid MFC set to  0.000000
11/29/2012	4:16:51 PM	Tube furnace set to 0
11/29/2012	4:16:59 PM	Helium valve closed
11/29/2012	4:16:59 PM	H2 valve closed
11/29/2012	4:16:59 PM	BCl3 valve closed
11/29/2012	4:16:59 PM	PH3 valve closed
11/29/2012	4:16:59 PM	SiCl4 pre valve closed
11/29/2012	4:16:59 PM	SiCl4 post valve closed
11/29/2012	4:16:59 PM	Main Vac valve closed
11/29/2012	4:16:59 PM	Bypass valve closed
11/29/2012	4:16:59 PM	Bubbler valve closed
11/29/2012	4:16:59 PM	Helium MFC set to  0.000000
11/29/2012	4:16:59 PM	H2 MFC set to  0.000000
11/29/2012	4:16:59 PM	BCl3 MFC set to  0.000000
11/29/2012	4:16:59 PM	PH3 MFC set to  0.000000
11/29/2012	4:16:59 PM	SiCl4 MFC set to  0.000000
11/29/2012	4:16:59 PM	Bypass solenoid MFC set to  0.000000
11/29/2012	4:16:59 PM	Tube furnace set to 0
11/29/2012	4:17:00 PM	Run finished at 4:17 PM
11/29/2012	4:17:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/29/2012	4:56:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/29/2012	4:56:10 PM	Recipe started at 4:56 PM
11/29/2012	4:56:10 PM	Helium valve closed
11/29/2012	4:56:10 PM	H2 valve closed
11/29/2012	4:56:10 PM	BCl3 valve closed
11/29/2012	4:56:10 PM	PH3 valve closed
11/29/2012	4:56:10 PM	SiCl4 pre valve closed
11/29/2012	4:56:10 PM	SiCl4 post valve closed
11/29/2012	4:56:10 PM	Main Vac valve closed
11/29/2012	4:56:10 PM	Bypass valve closed
11/29/2012	4:56:10 PM	Bubbler valve closed
11/29/2012	4:56:10 PM	Helium MFC set to  0.000000
11/29/2012	4:56:10 PM	H2 MFC set to  0.000000
11/29/2012	4:56:10 PM	BCl3 MFC set to  0.000000
11/29/2012	4:56:10 PM	PH3 MFC set to  0.000000
11/29/2012	4:56:10 PM	SiCl4 MFC set to  0.000000
11/29/2012	4:56:10 PM	Bypass solenoid MFC set to  0.000000
11/29/2012	4:56:10 PM	Tube furnace set to 0
11/29/2012	4:56:13 PM	H2 valve closed
11/29/2012	4:56:13 PM	BCl3 valve closed
11/29/2012	4:56:13 PM	PH3 valve closed
11/29/2012	4:56:13 PM	SiCl4 pre valve closed
11/29/2012	4:56:13 PM	SiCl4 post valve closed
11/29/2012	4:56:13 PM	Main Vac valve closed
11/29/2012	4:56:13 PM	Bypass valve closed
11/29/2012	4:56:13 PM	Bubbler valve closed
11/29/2012	4:56:13 PM	Helium valve opened
11/29/2012	4:56:13 PM	Helium MFC set to  500.000000
11/29/2012	4:56:13 PM	H2 MFC set to  0.000000
11/29/2012	4:56:13 PM	BCl3 MFC set to  0.000000
11/29/2012	4:56:13 PM	PH3 MFC set to  0.000000
11/29/2012	4:56:13 PM	SiCl4 MFC set to  0.000000
11/29/2012	4:56:13 PM	Bypass solenoid MFC set to  0.000000
11/29/2012	4:56:13 PM	Tube furnace set to 0
11/29/2012	4:56:14 PM	Helium valve closed
11/29/2012	4:56:14 PM	H2 valve closed
11/29/2012	4:56:14 PM	BCl3 valve closed
11/29/2012	4:56:14 PM	PH3 valve closed
11/29/2012	4:56:14 PM	SiCl4 pre valve closed
11/29/2012	4:56:14 PM	SiCl4 post valve closed
11/29/2012	4:56:14 PM	Main Vac valve closed
11/29/2012	4:56:14 PM	Bypass valve closed
11/29/2012	4:56:14 PM	Bubbler valve closed
11/29/2012	4:56:14 PM	Helium MFC set to  0.000000
11/29/2012	4:56:14 PM	H2 MFC set to  0.000000
11/29/2012	4:56:14 PM	BCl3 MFC set to  0.000000
11/29/2012	4:56:14 PM	PH3 MFC set to  0.000000
11/29/2012	4:56:14 PM	SiCl4 MFC set to  0.000000
11/29/2012	4:56:14 PM	Bypass solenoid MFC set to  0.000000
11/29/2012	4:56:14 PM	Tube furnace set to 0
11/29/2012	4:56:15 PM	Run finished at 4:56 PM
11/29/2012	4:56:15 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/29/2012	4:57:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/29/2012	4:57:21 PM	Recipe started at 4:57 PM
11/29/2012	4:57:21 PM	Helium valve closed
11/29/2012	4:57:21 PM	H2 valve closed
11/29/2012	4:57:21 PM	BCl3 valve closed
11/29/2012	4:57:21 PM	PH3 valve closed
11/29/2012	4:57:21 PM	SiCl4 pre valve closed
11/29/2012	4:57:21 PM	SiCl4 post valve closed
11/29/2012	4:57:21 PM	Main Vac valve closed
11/29/2012	4:57:21 PM	Bypass valve closed
11/29/2012	4:57:21 PM	Bubbler valve closed
11/29/2012	4:57:21 PM	Helium MFC set to  0.000000
11/29/2012	4:57:21 PM	H2 MFC set to  0.000000
11/29/2012	4:57:21 PM	BCl3 MFC set to  0.000000
11/29/2012	4:57:21 PM	PH3 MFC set to  0.000000
11/29/2012	4:57:21 PM	SiCl4 MFC set to  0.000000
11/29/2012	4:57:21 PM	Bypass solenoid MFC set to  0.000000
11/29/2012	4:57:21 PM	Tube furnace set to 0
11/29/2012	4:57:24 PM	H2 valve closed
11/29/2012	4:57:24 PM	BCl3 valve closed
11/29/2012	4:57:24 PM	PH3 valve closed
11/29/2012	4:57:24 PM	SiCl4 pre valve closed
11/29/2012	4:57:24 PM	SiCl4 post valve closed
11/29/2012	4:57:24 PM	Main Vac valve closed
11/29/2012	4:57:24 PM	Bypass valve closed
11/29/2012	4:57:24 PM	Bubbler valve closed
11/29/2012	4:57:24 PM	Helium valve opened
11/29/2012	4:57:24 PM	Helium MFC set to  500.000000
11/29/2012	4:57:24 PM	H2 MFC set to  0.000000
11/29/2012	4:57:24 PM	BCl3 MFC set to  0.000000
11/29/2012	4:57:24 PM	PH3 MFC set to  0.000000
11/29/2012	4:57:24 PM	SiCl4 MFC set to  0.000000
11/29/2012	4:57:24 PM	Bypass solenoid MFC set to  0.000000
11/29/2012	4:57:24 PM	Tube furnace set to 0
11/29/2012	4:57:24 PM	Helium valve closed
11/29/2012	4:57:24 PM	H2 valve closed
11/29/2012	4:57:24 PM	BCl3 valve closed
11/29/2012	4:57:24 PM	PH3 valve closed
11/29/2012	4:57:24 PM	SiCl4 pre valve closed
11/29/2012	4:57:24 PM	SiCl4 post valve closed
11/29/2012	4:57:24 PM	Main Vac valve closed
11/29/2012	4:57:24 PM	Bypass valve closed
11/29/2012	4:57:24 PM	Bubbler valve closed
11/29/2012	4:57:24 PM	Helium MFC set to  0.000000
11/29/2012	4:57:24 PM	H2 MFC set to  0.000000
11/29/2012	4:57:24 PM	BCl3 MFC set to  0.000000
11/29/2012	4:57:24 PM	PH3 MFC set to  0.000000
11/29/2012	4:57:24 PM	SiCl4 MFC set to  0.000000
11/29/2012	4:57:24 PM	Bypass solenoid MFC set to  0.000000
11/29/2012	4:57:25 PM	Tube furnace set to 0
11/29/2012	4:57:26 PM	Run finished at 4:57 PM
11/29/2012	4:57:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/29/2012	4:59:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/29/2012	4:59:59 PM	Recipe started at 4:59 PM
11/29/2012	5:00:00 PM	Helium valve closed
11/29/2012	5:00:00 PM	H2 valve closed
11/29/2012	5:00:00 PM	BCl3 valve closed
11/29/2012	5:00:00 PM	PH3 valve closed
11/29/2012	5:00:00 PM	SiCl4 pre valve closed
11/29/2012	5:00:00 PM	SiCl4 post valve closed
11/29/2012	5:00:00 PM	Main Vac valve closed
11/29/2012	5:00:00 PM	Bubbler valve closed
11/29/2012	5:00:00 PM	Bypass valve opened
11/29/2012	5:00:00 PM	Helium MFC set to  0.000000
11/29/2012	5:00:00 PM	H2 MFC set to  0.000000
11/29/2012	5:00:00 PM	BCl3 MFC set to  0.000000
11/29/2012	5:00:00 PM	PH3 MFC set to  0.000000
11/29/2012	5:00:00 PM	SiCl4 MFC set to  0.000000
11/29/2012	5:00:00 PM	Bypass solenoid MFC set to  0.000000
11/29/2012	5:00:00 PM	Tube furnace set to 0
11/29/2012	5:01:20 PM	Helium valve closed
11/29/2012	5:01:20 PM	H2 valve closed
11/29/2012	5:01:20 PM	BCl3 valve closed
11/29/2012	5:01:20 PM	PH3 valve closed
11/29/2012	5:01:20 PM	SiCl4 pre valve closed
11/29/2012	5:01:20 PM	SiCl4 post valve closed
11/29/2012	5:01:20 PM	Main Vac valve closed
11/29/2012	5:01:20 PM	Bubbler valve closed
11/29/2012	5:01:20 PM	Bypass valve opened
11/29/2012	5:01:20 PM	Helium MFC set to  0.000000
11/29/2012	5:01:20 PM	H2 MFC set to  0.000000
11/29/2012	5:01:20 PM	BCl3 MFC set to  0.000000
11/29/2012	5:01:20 PM	PH3 MFC set to  0.000000
11/29/2012	5:01:20 PM	SiCl4 MFC set to  0.000000
11/29/2012	5:01:20 PM	Bypass solenoid MFC set to  0.000000
11/29/2012	5:01:20 PM	Tube furnace set to 0
11/29/2012	5:02:20 PM	Helium valve closed
11/29/2012	5:02:20 PM	H2 valve closed
11/29/2012	5:02:20 PM	BCl3 valve closed
11/29/2012	5:02:20 PM	PH3 valve closed
11/29/2012	5:02:20 PM	SiCl4 pre valve closed
11/29/2012	5:02:20 PM	SiCl4 post valve closed
11/29/2012	5:02:20 PM	Bypass valve closed
11/29/2012	5:02:20 PM	Bubbler valve closed
11/29/2012	5:02:20 PM	Main Vac valve opened
11/29/2012	5:02:20 PM	Helium MFC set to  0.000000
11/29/2012	5:02:20 PM	H2 MFC set to  0.000000
11/29/2012	5:02:20 PM	BCl3 MFC set to  0.000000
11/29/2012	5:02:20 PM	PH3 MFC set to  0.000000
11/29/2012	5:02:20 PM	SiCl4 MFC set to  0.000000
11/29/2012	5:02:20 PM	Bypass solenoid MFC set to  0.000000
11/29/2012	5:02:20 PM	Tube furnace set to 0
11/29/2012	5:02:21 PM	Run finished at 5:02 PM
11/29/2012	5:02:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
